Shutdown lampoly SNF 2010-05-12 22:24:50: pump fail

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu May 13 13:58:01 PDT 2010


Broken wafer inside the chamber.  Wet cleaned the chamber and cleaned the inner exit door o-ring. Ran4 wafers using recipe 45 with no problems.




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