Comment lampoly SNF 2010-05-14 13:10:48: Leak Rate test and Gas Cal Data

usha at snf.stanford.edu usha at snf.stanford.edu
Fri May 14 13:10:48 PDT 2010


Test done on 5/14/2010 @11:30AM.  All the cal errors are in negative 
once again.
Chamber leak rate = 0.19mt/min
Gas       Flow rate, sccm    Cal Error, sccm
Cl2                25                    -1.99
HBr              100                   -3.48
HeO2             5                     -0.21
SF6              100                  -5.27
He                  50                   -3.83
C2F6            100                  -3.63
O2                   50                  -1.42
N2                   25                  -1.76




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