Problem lampoly SNF 2010-05-16 13:39:01: pumpdown fail again

cursive at snf.stanford.edu cursive at snf.stanford.edu
Sun May 16 13:39:01 PDT 2010

Previous message: Problem lampoly SNF 2010-05-16 13:12:51: pressure tolerance exceeds
Next message: Problem lampoly SNF 2010-05-16 13:39:01: pumpdown fail again
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

running recipe 1.
entrance pumpdown fail, convectron above crossover pressure
dummy wafers are inside the chamber

Previous message: Problem lampoly SNF 2010-05-16 13:12:51: pressure tolerance exceeds
Next message: Problem lampoly SNF 2010-05-16 13:39:01: pumpdown fail again
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list