Shutdown lampoly SNF 2010-05-16 13:40:07: pumpdown fail, wafers are inside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun May 16 22:34:08 PDT 2010


The same error this morning, i chekced the load pump with
external vacuum gauge and it base out to 30mt.  manually
leak check both exterance and exit load lock and both leak
rate is <10mt. I cycled wafers and could not duplicate the
same fault. will monitor the load foreline.




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