Shutdown lampoly SNF 2010-05-19 17:43:58: Exit arm stuck
rik at snf.stanford.edu
rik at snf.stanford.edu
Wed May 19 17:43:59 PDT 2010
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Shutdown lampoly SNF 2010-05-16 13:40:07: pumpdown fail, wafers are inside
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Shutdown lampoly SNF 2010-05-19 17:43:58: Exit arm stuck
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Shutdown lampoly SNF 2010-05-16 13:40:07: pumpdown fail, wafers are inside
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Shutdown lampoly SNF 2010-05-19 17:43:58: Exit arm stuck
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