Shutdown lampoly SNF 2010-05-21 00:12:48: wafer is inside chamber.

raneeyoo at raneeyoo at
Fri May 21 00:12:49 PDT 2010

there was en error while I was using this.
"Error: 4 entrance loiad lock outer door CLOSED. sensor failed. Should be true."
One wafer is inside ATM chamer.
Please put the wafer in a wafer box nemed "DAESUNG LEE" near the lampoly table.
My cell is 650-269-7791.
Please give me a call when you take the wafer out.
thank you very much.
Kyeongran Yoo

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