Problem lampoly SNF 2010-05-21 00:40:42: wafer inside

raneeyoo at raneeyoo at
Fri May 21 00:40:42 PDT 2010

While I was using Lampoly.
An error came.
"Error 4: Entrance load lock outer door CLOSED. sensor failed.  Should be TRUE."
So one wafer is in the ATM chamber now.
When you can take the wafer out, could you please put the wafer into a box named "DAESUNG LEE" on the table near to Lampoly?
I also made notes on Lampoly and the box.
Thank you so much.
Kyeongran Yoo
raneeyoo at

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