Comment lampoly SNF 2010-05-21 00:43:19: a wafer is inside chamber

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Fri May 21 00:43:20 PDT 2010


Hello!
While I was using Lampoly.
An error came.
"Error 4: Entrance load lock outer door CLOSED. sensor failed.  Should be TRUE."
So one wafer is in the ATM chamber now.
When you can take the wafer out, could you please put the wafer into a box named "DAESUNG LEE" on the table near to Lampoly?
I also made notes on Lampoly and the box.
Thank you so much.
Kyeongran Yoo
raneeyoo at stanford.edu
650-269-7791




More information about the lampoly-pcs mailing list