Shutdown lampoly SNF 2010-05-21 00:12:48: wafer is inside chamber.

eenriquez at eenriquez at
Fri May 21 09:35:34 PDT 2010

The entry load lock was unable to pump down to base pressure.  Cleaned the outer door o-ring and cleared the alarm.  The user's wafer went through the system and was processesed.  Placed the user's wafer in his wafer box (slot#2).  Ran 5 additional wafers with no problems.  

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