From mtang at snf.stanford.edu Thu Nov 4 16:57:58 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 4 Nov 2010 16:57:58 -0700 Subject: Comment lampoly SNF 2010-11-04 16:57:58: Update Message-ID: Entrance loadlock door is stuck. Cesar cleaned the pneumatics to get them working last time and had ordered replacement ones -- it's likely these will have to be replaced now. Cesar adjusted the gross ICP tune position. This morning, we ran about a dozen wafers on recipe 1 without problem although noticed that the load setting was creeping up to the maximum of 32525. He adjusted the ICP tune position to 0 degrees and we ran more wafers. After about a dozen, the RF tune problem occurred again, about 20 seconds into step 7 (same symptoms as yesterday, where system tunes nicely, but suddenly detunes after 75-90 seconds of plasma.) Jim McV has some ideas and I hope to corner him tomorrow. From mtang at snf.stanford.edu Sun Nov 7 07:55:12 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 7 Nov 2010 07:55:12 -0800 Subject: Comment lampoly SNF 2010-11-07 07:55:11: Update Message-ID: Cesar adjusted the bleed on the entrance loadlock door pneumatic. His thinking is that it is activating properly, but fails to bleed off pressure completely so keeps the door shut. Elmer found one of the small fans on the generator system had failed -- not a smokling gun, but might explain the observation that the problem gets worse as the system is run consistently and disappears after it has been idle. The load and tune positions are still way off, however -- even when the ICP tunes well, the tune setting is near the limit so there is little room for tuning if running different recipes. We hope to get Jim McV to hook up the impedence meter to see if we can recenter the tuning setpoints. From cbaxter at snf.stanford.edu Sun Nov 7 19:19:16 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 7 Nov 2010 19:19:16 -0800 Subject: Comment lampoly SNF 2010-11-07 19:19:15: Update Message-ID: I ran more than 200 wafers since Sat nite, so far no rf problem, will continue testing till Mon. From cbaxter at snf.stanford.edu Tue Nov 9 08:55:52 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Nov 2010 08:55:52 -0800 Subject: Shutdown lampoly SNF 2010-10-28 16:53:14: Entrance loadlock won't open Message-ID: Entrance outter door is working for now, solenoid is on order. RF is still need to be fine tune, i cycled over 200 wafers w/out problem with rf using recipe#1. From mtang at snf.stanford.edu Tue Nov 9 12:58:14 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 9 Nov 2010 12:58:14 -0800 Subject: Shutdown lampoly SNF 2010-11-09 12:58:14: Replacing RF cables Message-ID: RF cables are noticeably blacked on the outside, although the inside still looks good. Cesar is measuring cables for replacement, just in case. From cbaxter at snf.stanford.edu Wed Nov 10 11:28:29 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 10 Nov 2010 11:28:29 -0800 Subject: Comment lampoly SNF 2010-11-10 11:28:28: Update Message-ID: Build two new rf cable for the upper electrode, now testing... From mtang at snf.stanford.edu Wed Nov 10 15:32:39 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 10 Nov 2010 15:32:39 -0800 Subject: Shutdown lampoly SNF 2010-11-09 12:58:14: Replacing RF cables Message-ID: Cesar replaced two of the upper electrode RF cables. He (we think) also made an adjustment to the load pot following a discussion with Elmer. He swapped the pneumatic from the entrance loadlock door which was giving us problems to the loader lift station -- the replacement pneumatic hasn't arrived yet and the thinking was the lift would be less of a load on the pneumatic. However, it is now flaky. But Elmer placed a clamp onto the pneumatic and it's not pretty (the pneumatic box is open) but it seems to work. The 24V fan was ordered and has arrived, but is a slightly different size than the old one, so the RF match electronics box is left open to cool in the meantime. We ran the recipes appearing over the last 8 months in the log book. The standards seem to run reasonably well, although tuning is not quite as good or as fast as we normally see. It looks like the SF6 recipes in particular, are not stable, so would not recommend running these. We will need to do more work, but will put the system over to yellow for now. Qual has not yet been run. From mtang at snf.stanford.edu Wed Nov 10 15:37:35 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 10 Nov 2010 15:37:35 -0800 Subject: Problem lampoly SNF 2010-11-10 15:37:34: OK for non SF6 recipes Message-ID: The system seems to be running, although with some issues which will still need to be addressed. Be careful as the cover for the pneumatics is left open as is the cover to the RF match electronics. Neither is in a the wafer loading, unloading or programming area, so should not interfere with operation. (See shutdown clear if you want gory details.) The system does not tune consistently as well as we'd like, but is within the tolerance level. The plasma is not stable in some SF6 recipes, so would recommend not running SF6. Recipe 99, however, seems to run well. Qual hasn't been run yet. Please log your recipes in the logbook and note any observations on equipment performance in Coral. Thanks. From eenriquez at snf.stanford.edu Wed Nov 10 16:03:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Nov 2010 16:03:15 -0800 Subject: Comment lampoly SNF 2010-10-29 16:45:56: Message-ID: From wslee at snf.stanford.edu Wed Nov 10 18:50:33 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 10 Nov 2010 18:50:33 -0800 Subject: Shutdown lampoly SNF 2010-11-10 18:50:32: Non-stable plasma Message-ID: Plasma keeps flickering. From mtang at snf.stanford.edu Fri Nov 12 16:15:09 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 12 Nov 2010 16:15:09 -0800 Subject: Shutdown lampoly SNF 2010-11-10 18:50:32: Non-stable plasma Message-ID: Jim Haydon inspected the RF cables and tightened down connections. He found and tightened a wobbly connection on a grounding strap to the upper electrode. The system etches now without flickering plasma. It tunes reasonably well for recipes 1 and 99. However, the tune and load settings are still near their limit. The system is conditionally OK to use. It will be fine for zero level mark etching on blank silicon wafers. It may not tune well for other recipes or other wafers -- conditions where the automatch is at the limit. So please run test wafers for your recipe and watch your wafers very carefully. If the system faults for RF match, do not continue running your recipe or wafers. We hope to try to find ways to recenter the match system on Monday. From mtang at snf.stanford.edu Fri Nov 12 16:16:31 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 12 Nov 2010 16:16:31 -0800 Subject: Problem lampoly SNF 2010-11-12 16:16:31: Watch reflected power Message-ID: The system etches now without flickering plasma. It tunes reasonably well for recipes 1 and 99. However, the tune and load settings are still near their limit. The system is conditionally OK to use. It will be fine for zero level mark etching on blank silicon wafers. It may not tune well for other recipes or other wafers -- conditions where the automatch is at the limit. So if you wish to use the system, please run test wafers for your recipe and watch your wafers very carefully. If the system faults for RF match, do not continue running your recipe or wafers. If you have a specific recipe you would like to test, let me know. We hope to try to find ways to recenter the match system on Monday. From cbaxter at snf.stanford.edu Mon Nov 15 09:16:40 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Nov 2010 09:16:40 -0800 Subject: Comment lampoly SNF 2010-11-15 09:16:39: Update Message-ID: installed new vacuum/load lifter solenoid. From bchui at snf.stanford.edu Mon Nov 15 19:35:29 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 15 Nov 2010 19:35:29 -0800 Subject: Comment lampoly SNF 2010-11-15 19:35:28: Si dummies fine; poly wafers marginal Message-ID: poly wafers had flickering plasma as Mary reported. From cbaxter at snf.stanford.edu Wed Nov 17 09:59:12 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 17 Nov 2010 09:59:12 -0800 Subject: Shutdown lampoly SNF 2010-11-17 09:59:11: Update Message-ID: Troubleshootng intermittent rf problem.. From mtang at snf.stanford.edu Wed Nov 17 15:54:10 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 17 Nov 2010 15:54:10 -0800 Subject: Comment lampoly SNF 2010-11-17 15:54:10: RF Troubleshooting Message-ID: The plasma flickers when the machine is warmed up. When it's cold, there is no flicker. Cesar and Jim took the RF match system apart, looking for oxidized or worn connectors. There are two banana plugs which connect the RF match to the chamber which look bent and worn. Elmer, Cesar, and Jim are continuing to clean up the match. From cbaxter at snf.stanford.edu Thu Nov 18 12:07:01 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Nov 2010 12:07:01 -0800 Subject: Shutdown lampoly SNF 2010-11-17 09:59:11: Update Message-ID: RF still need to be fine tuned.. From usha at snf.stanford.edu Thu Nov 18 15:33:12 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 18 Nov 2010 15:33:12 -0800 Subject: Shutdown lampoly SNF 2010-11-18 15:33:11: Wafer not sensed Message-ID: Arm would not retract from exit cassette as wafer was nnot sensed. No vacuum was felt and so I lifted the wafer and placed it back in slot. Arm retracted with the wafer and went inside chamber to unload chamber. Exit arm sensor and extension action failure alarm. From eenriquez at snf.stanford.edu Fri Nov 19 15:00:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:00:19 -0800 Subject: Shutdown lampoly SNF 2010-11-18 15:33:11: Wafer not sensed Message-ID: Wafer broke inside the chamber. Cleaned the chamber and the exit load lock. Ran 25 conditioning wafers using recipe 1. From bchui at snf.stanford.edu Fri Nov 19 18:18:07 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 19 Nov 2010 18:18:07 -0800 Subject: Problem lampoly SNF 2010-11-19 18:18:07: Plasma still flickering Message-ID: Ran Si dummies standard recipe 1; plasma shows some flickering during Main Etch, severe flickering during Overetch. Tried increasing bottom RF from 60 to 90, cured the flicker but got zero etch rate. From mtang at snf.stanford.edu Tue Nov 23 13:03:40 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 23 Nov 2010 13:03:40 -0800 Subject: Comment lampoly SNF 2010-11-23 13:03:39: Machine troubleshooting next week Message-ID: Plans are to get the experts together on Monday to look at the RF system. We've reserved for a few days, just in case. From bchui at snf.stanford.edu Tue Nov 23 17:43:59 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 23 Nov 2010 17:43:59 -0800 Subject: Shutdown lampoly SNF 2010-11-23 17:43:59: device wafer stuck in chamber Message-ID: I ran four test dummies successfully, then tried a device wafer. The device wafer also etched successfully, but when the unload arm tried to unload the wafer into the exit cassette, the exit cassette apparently didn't advance upwards, causing the wafer to stay on the arm and return to the ELL (this happened yesterday too but i was able to do 'wafer cleanup' to retrieve it. Today, the machine didn't allow me that option.) Worse still, the exit arm then returned the wafer to the etch chamber (because I was following up the device wafer with more dummies). I don't know if my device wafer is still intact inside the etch chamber (there are two wafers in there now), but if it is, please try to remove it in one piece. Thanks. From eenriquez at snf.stanford.edu Wed Nov 24 13:27:54 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Nov 2010 13:27:54 -0800 Subject: Shutdown lampoly SNF 2010-11-23 17:43:59: device wafer stuck in chamber Message-ID: Retrieved 2 wafers from the chamber. Cycled wafers with no problems. From bchui at snf.stanford.edu Fri Nov 26 17:43:33 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 26 Nov 2010 17:43:33 -0800 Subject: Comment lampoly SNF 2010-11-26 17:43:32: higher bottom RF works Message-ID: raising the bottom RF from 60 to 90 works, gives about 3200A/min poly etch rate. From bchui at snf.stanford.edu Mon Nov 29 16:31:43 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 29 Nov 2010 16:31:43 -0800 Subject: Comment lampoly SNF 2010-11-29 16:31:43: no RF Message-ID: I saw that the machine was yellow-lighted so I tried to use it, but no RF came on (RF-top was zero). From mtang at snf.stanford.edu Mon Nov 29 16:37:21 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 29 Nov 2010 16:37:21 -0800 Subject: Shutdown lampoly SNF 2010-11-29 16:37:18: RF troubleshooting continues Message-ID: Cesar, Jim H and Jim McV have been troubleshooting RF problems. They have checked and cleaned up connections. So far, so good. There are a few more things they will be checking out (100 mt baratron cal, cooling fans, tuning center point.) From bchui at snf.stanford.edu Mon Nov 29 18:09:19 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 29 Nov 2010 18:09:19 -0800 Subject: Comment lampoly SNF 2010-11-29 18:09:18: Two wafers stuck in transport Message-ID: Per my previous comment, please note that there are two dummies stuck in transport (one in etch chamber, one in ELL). Should be readily recoverable w/ wafer cleanout.