Shutdown lampoly SNF 2010-10-28 16:53:14: Entrance loadlock won't open

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Nov 9 08:55:52 PST 2010


Entrance outter door is working for now, solenoid is on
order. RF is still need to be fine tune, i cycled over 200 wafers
w/out problem with rf using recipe#1.




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