Shutdown lampoly SNF 2010-11-18 15:33:11: Wafer not sensed

usha at snf.stanford.edu usha at snf.stanford.edu
Thu Nov 18 15:33:12 PST 2010


Arm would not retract from exit cassette as wafer was nnot sensed.  No vacuum was felt and so I lifted the wafer and placed it back in slot.  
Arm retracted with the wafer and went inside chamber to unload chamber.  Exit arm sensor and extension action failure alarm.




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