Shutdown lampoly SNF 2010-11-18 15:33:11: Wafer not sensed

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Nov 19 15:00:19 PST 2010


Wafer broke inside the chamber.  Cleaned the chamber and the exit load lock.  Ran 25 conditioning wafers using recipe 1.




More information about the lampoly-pcs mailing list