Problem lampoly SNF 2010-11-19 18:18:07: Plasma still flickering

bchui at snf.stanford.edu bchui at snf.stanford.edu
Fri Nov 19 18:18:07 PST 2010


Ran Si dummies standard recipe 1; plasma shows some flickering during Main Etch, severe flickering during Overetch.  Tried increasing bottom RF from 60 to 90, cured the flicker but got zero etch rate.




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