Comment lampoly SNF 2010-11-29 18:09:18: Two wafers stuck in transport

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Nov 29 18:09:19 PST 2010


Per my previous comment, please note that there are two dummies stuck in transport (one in etch chamber, one in ELL). Should be readily recoverable w/ wafer cleanout.




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