November 2010 Archives by author

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Starting: Thu Nov 4 16:57:58 PDT 2010
Ending: Mon Nov 29 18:09:19 PST 2010
Messages: 27

• Comment lampoly SNF 2010-11-15 19:35:28: Si dummies fine; poly wafers marginal   bchui at snf.stanford.edu
• Problem lampoly SNF 2010-11-19 18:18:07: Plasma still flickering   bchui at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-23 17:43:59: device wafer stuck in chamber   bchui at snf.stanford.edu
• Comment lampoly SNF 2010-11-26 17:43:32: higher bottom RF works   bchui at snf.stanford.edu
• Comment lampoly SNF 2010-11-29 16:31:43: no RF   bchui at snf.stanford.edu
• Comment lampoly SNF 2010-11-29 18:09:18: Two wafers stuck in transport   bchui at snf.stanford.edu
• Comment lampoly SNF 2010-11-07 19:19:15: Update   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-28 16:53:14: Entrance loadlock won't open   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-11-10 11:28:28: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-11-15 09:16:39: Update   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-17 09:59:11: Update   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-17 09:59:11: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-10-29 16:45:56:   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-18 15:33:11: Wafer not sensed   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-23 17:43:59: device wafer stuck in chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-11-04 16:57:58: Update   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-11-07 07:55:11: Update   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-09 12:58:14: Replacing RF cables   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-09 12:58:14: Replacing RF cables   mtang at snf.stanford.edu
• Problem lampoly SNF 2010-11-10 15:37:34: OK for non SF6 recipes   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-10 18:50:32: Non-stable plasma   mtang at snf.stanford.edu
• Problem lampoly SNF 2010-11-12 16:16:31: Watch reflected power   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-11-17 15:54:10: RF Troubleshooting   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-11-23 13:03:39: Machine troubleshooting next week   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-29 16:37:18: RF troubleshooting continues   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-18 15:33:11: Wafer not sensed   usha at snf.stanford.edu
• Shutdown lampoly SNF 2010-11-10 18:50:32: Non-stable plasma   wslee at snf.stanford.edu

Last message date: Mon Nov 29 18:09:19 PST 2010
Archived on: Sun Dec 23 09:06:15 PST 2012

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