Shutdown lampoly SNF 2010-10-05 19:05:05: one of the dummy wafers has broken inside the chamber

jaehlee at snf.stanford.edu jaehlee at snf.stanford.edu
Tue Oct 5 19:05:05 PDT 2010


The following were what I did : 
I ran 7 dummy wafers with recipe #28. 
It has RF top power of 300 instead of 250 and it showed RF tolerence error whice I didn't see before. 
While running 6th dummy wafer, it didn't come out from the chamber. 
Sorry for shutting lampoly down twice but this recipe did work for SiC etching for last two years. 




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