Comment lampoly SNF 2010-10-11 15:52:19: Update RF tuning
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Oct 11 15:52:20 PDT 2010
Chaned VAT delay time from 2 sec to 0 on Recipe 1. Also adjusted the VAT presets. Ran 45 wafers with no problems.
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