Comment lampoly SNF 2010-10-11 15:52:19: Update RF tuning

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 11 15:52:20 PDT 2010


Chaned VAT delay time from 2 sec to 0 on Recipe 1.  Also adjusted the VAT presets.  Ran 45 wafers with no problems.




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