Shutdown lampoly SNF 2010-10-12 07:40:56: Chamber wet clean
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Oct 12 07:40:56 PDT 2010
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Problem lampoly SNF 2010-10-11 19:42:01: RF tolerance exceeded
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Shutdown lampoly SNF 2010-10-12 07:40:56: Chamber wet clean
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