Comment lampoly SNF 2010-10-12 13:43:18: RF instability

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Oct 12 13:43:19 PDT 2010


Helping test the Lampoly after wet clean.
Ran 3 dummy wafers using recipe 28 (300W).
1st wafer ran fine.
Elmer changed some recipe settings to emulate Daesung's recipe.
2nd wafer RF unstable after 68sec.
3rd wafer RF unstable after 27sec.




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