Comment lampoly SNF 2010-10-12 15:00:26: continue testing after wet clean

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Oct 12 15:00:27 PDT 2010


recipe 1, 100sec main etch
ran 10 wafers through without RF instability.
1 wafer had exit door sensor issue that Elmer resolved.




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