Shutdown lampoly SNF 2010-10-13 06:51:39: See Daesung's problem report

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 13 11:44:49 PDT 2010


Retrived wafer.  Adjusted the exit load lock inner door closing speed.  Cycled 15 wafers using recipe 1 with no problems.




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