Problem lampoly SNF 2010-10-12 18:35:40: Exit loag lock inner close sensor fail

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 13 11:44:55 PDT 2010


Retrived wafer.  Adjusted the exit load lock inner door closing speed.  Cycled 15 wafers using recipe 1 with no problems.




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