Problem lampoly SNF 2010-10-13 17:39:44: Entrance load lock outer door closed sensor failed

daesung at snf.stanford.edu daesung at snf.stanford.edu
Wed Oct 13 17:39:45 PDT 2010

Previous message: Problem lampoly SNF 2010-10-13 15:39:29: Shuttle failed request to move to home position
Next message: Problem lampoly SNF 2010-10-13 17:39:44: Entrance load lock outer door closed sensor failed
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

One of my process wafers is stuck inside. Occurred for the first wafer I ran.

Previous message: Problem lampoly SNF 2010-10-13 15:39:29: Shuttle failed request to move to home position
Next message: Problem lampoly SNF 2010-10-13 17:39:44: Entrance load lock outer door closed sensor failed
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list