Shutdown lampoly SNF 2010-10-14 09:36:16: LL doors are intermittent

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Oct 18 10:08:59 PDT 2010


Removed entrance outter door solenoid and cleaned with
ipa and lube actuator cylinder with fomblin grease. Cycled
door on manual mode w/out problem, cycled system with
dummy wafers using recipe#1. Still need to replace outter
solenoid,  will place the order  as soon  as we find the correct 
part number..




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