Problem lampoly SNF 2010-10-13 17:39:44: Entrance load lock outer door closed sensor failed

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 19 07:37:52 PDT 2010

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Recovered the wafer

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Next message: Shutdown lampoly SNF 2010-10-14 09:36:16: LL doors are intermittent
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