Problem lampoly SNF 2010-10-04 18:35:41: error #2 entrance load failed requeseted rotate action

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 19 07:39:49 PDT 2010


Removed entrance outter door solenoid and cleaned with
ipa and lube actuator cylinder with fomblin grease. Cycled
door on manual mode w/out problem, cycled system with
dummy wafers using recipe#1. Still need to replace outter
solenoid,  will place the order  as soon  as we find the correct 
part number..




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