Shutdown lampoly SNF 2010-10-25 12:29:08: wafer stuck at output

wslee at snf.stanford.edu wslee at snf.stanford.edu
Mon Oct 25 12:29:09 PDT 2010


Alarm says 'wafer not sensed at output' and the load arm is sticking out of the loadlock.  I ran recipe 99 for 1 wafer.




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