Shutdown lampoly SNF 2010-10-25 12:29:08: wafer stuck at output
wslee at snf.stanford.edu
wslee at snf.stanford.edu
Mon Oct 25 12:29:09 PDT 2010
Alarm says 'wafer not sensed at output' and the load arm is sticking out of the loadlock. I ran recipe 99 for 1 wafer.
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