October 2010 Archives by thread

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Starting: Fri Oct 1 11:57:56 PDT 2010
Ending: Fri Oct 29 16:49:44 PDT 2010
Messages: 67

• Comment lampoly SNF 2010-10-01 11:57:55: Update   mtang at snf.stanford.edu
  • Comment lampoly SNF 2010-10-01 11:57:55: Update   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-09-28 12:45:30: DC Bias problem   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-10-03 07:27:16: Update   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-10-04 12:40:42: Overflow error   mtang at snf.stanford.edu
  • Comment lampoly SNF 2010-10-04 12:40:42: Overflow error   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-10-04 18:35:41: error #2 entrance load failed requeseted rotate action   jaehlee at snf.stanford.edu
  • Problem lampoly SNF 2010-10-04 18:35:41: error #2 entrance load failed requeseted rotate action   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-05 00:28:01: wafer stuck on edge finder   wslee at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-05 00:28:01: wafer stuck on edge finder   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-05 19:05:05: one of the dummy wafers has broken inside the chamber   jaehlee at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-05 19:05:05: one of the dummy wafers has broken inside the chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-06 10:05:54: Broken wafer   cbaxter at snf.stanford.edu
  • Comment lampoly SNF 2010-10-06 10:05:54: Broken wafer   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-06 17:56:25: RF tolerance error problem   mtang at snf.stanford.edu
  • Comment lampoly SNF 2010-10-06 17:56:25: RF tolerance error problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-07 12:39:33: Update   cbaxter at snf.stanford.edu
  • Comment lampoly SNF 2010-10-07 12:39:33: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-27 08:20:24: Update:   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-27 08:55:37: Update:   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-14 13:50:28: Chiller problem, fixed   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-30 15:18:17: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-27 09:52:47: Update on RF   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-07-20 13:49:33: Correction   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-11 15:52:19: Update RF tuning   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2010-10-11 15:52:19: Update RF tuning   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-10-11 19:42:01: RF tolerance exceeded   daesung at snf.stanford.edu
  • Problem lampoly SNF 2010-10-11 19:42:01: RF tolerance exceeded   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-12 07:40:56: Chamber wet clean   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-12 07:40:56: Chamber wet clean   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-12 13:43:18: RF instability   yeh at snf.stanford.edu
  • Comment lampoly SNF 2010-10-12 13:43:18: RF instability   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-12 15:00:26: continue testing after wet clean   yeh at snf.stanford.edu
  • Comment lampoly SNF 2010-10-12 15:00:26: continue testing after wet clean   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-10-12 18:35:40: Exit loag lock inner close sensor fail   daesung at snf.stanford.edu
  • Problem lampoly SNF 2010-10-12 18:35:40: Exit loag lock inner close sensor fail   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-13 06:51:39: See Daesung's problem report   mtang at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-13 06:51:39: See Daesung's problem report   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-10-13 15:39:29: Shuttle failed request to move to home position   daesung at snf.stanford.edu
  • Problem lampoly SNF 2010-10-13 15:39:29: Shuttle failed request to move to home position   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-10-13 17:39:44: Entrance load lock outer door closed sensor failed   daesung at snf.stanford.edu
  • Problem lampoly SNF 2010-10-13 17:39:44: Entrance load lock outer door closed sensor failed   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-14 09:36:16: LL doors are intermittent   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-14 09:36:16: LL doors are intermittent   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-08-16 16:12:39: Shuttle vacuum sensor   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-08-18 10:32:30: floppy drive   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-06 17:05:58: Recipe 1   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-14 14:52:38: Update LL doors   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2010-10-14 14:52:38: Update LL doors   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-19 10:17:44: Cycled wafers   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2010-10-19 10:17:44: Cycled wafers   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-10-20 15:06:57: gap drive electrode height not high enough error   bchui at snf.stanford.edu
  • Problem lampoly SNF 2010-10-20 15:06:57: gap drive electrode height not high enough error   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-21 08:51:23: Vacuum pump oil leak   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-21 08:51:23: Vacuum pump oil leak   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-21 13:55:48: Update vacuum pump   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2010-10-21 13:55:48: Update vacuum pump   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-25 12:29:08: wafer stuck at output   wslee at snf.stanford.edu
  • Shutdown lampoly SNF 2010-10-25 12:29:08: wafer stuck at output   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-10-25 13:32:21: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-10-26 12:46:26: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-10-26 21:11:08: Update   mtang at snf.stanford.edu
• Problem lampoly SNF 2010-10-28 13:55:33: RF hard tolerance exceeded   daesung at snf.stanford.edu
• Shutdown lampoly SNF 2010-10-28 16:53:14: Entrance loadlock won't open   mtang at snf.stanford.edu
• Problem lampoly SNF 2010-10-28 17:00:49: RF unstable   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-10-29 16:45:56:   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-10-29 16:49:43: Update   mtang at snf.stanford.edu

Last message date: Fri Oct 29 16:49:44 PDT 2010
Archived on: Sun Dec 23 09:06:15 PST 2012

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