From wslee at snf.stanford.edu Wed Sep 1 11:47:54 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 1 Sep 2010 11:47:54 -0700 Subject: Problem lampoly SNF 2010-09-01 11:47:53: out of log sheets Message-ID: All log sheets are filled out. Please add new ones... From xuanwu at snf.stanford.edu Mon Sep 6 17:05:59 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Mon, 6 Sep 2010 17:05:59 -0700 Subject: Comment lampoly SNF 2010-09-06 17:05:58: Recipe 1 Message-ID: Someone changed recipe 1 OE to 10s. I changed it back to 30s and saved it. From mtang at snf.stanford.edu Wed Sep 8 08:47:34 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 8 Sep 2010 08:47:34 -0700 Subject: Problem lampoly SNF 2010-09-01 11:47:53: out of log sheets Message-ID: New logsheets were added last week. Please log your recipes and runs! From daesung at snf.stanford.edu Wed Sep 8 22:11:20 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 8 Sep 2010 22:11:20 -0700 Subject: Problem lampoly SNF 2010-09-08 22:11:20: Wafer chiller failure Message-ID: From mdickey at snf.stanford.edu Thu Sep 9 05:56:00 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Sep 2010 05:56:00 -0700 Subject: Problem lampoly SNF 2010-09-08 22:11:20: Wafer chiller failure Message-ID: topped off lower electrode chiller coolant level From xuanwu at snf.stanford.edu Thu Sep 9 13:42:28 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Thu, 9 Sep 2010 13:42:28 -0700 Subject: Problem lampoly SNF 2010-09-09 13:42:28: RF refl power Message-ID: I ran recipe 1 on 5 dummy wafers, but the first three had really high top RF refl powers on step 7, and that caused the hard tolerance to be exceeded. The last 2 wafers were okay. I then ran recipe 80, and the main etch aborted because of the same problem. I ran my wafer through again, and then it worked, but the tuning was fluctuating a lot. From mtang at snf.stanford.edu Thu Sep 9 15:51:00 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 9 Sep 2010 15:51:00 -0700 Subject: Comment lampoly SNF 2010-09-09 15:51:00: Load/tune adjustments Message-ID: Xuan Wu reported plasma instability problems. The system does not tune SF6 plasma well. However, it also had problems with good old recipe 1. So, I adjusted the tune and load settings for top RF in recipes 1 & 2 as follows: Step 3: Old 18000/10000 -> new 23000/12000 Step 5: Old 14000/19000 -> new 21000/19000 Step 7: old 14000/23000 -> new 19000/23000 Recipe 25: Same as above Recipe 90: Step 3 as above Step 5: 14000/20000 -> 21000/20000 Step 7: 14000/20000 -> 20000/20000 Recipe 99 is the high power SF6 plasma (600W) -- reflected power is non-zer, but below 5%. Recipe 80/180 is Nahid's isotropic etch -- could not control reflected power very well. One version had 25 sccm of He -- this could not control at all. Removing the He (another version) improved reflected power, but it was still about 15% of range. The tune presets are very different from a month ago when we last looked at them. I think maybe the upper electrode RF match needs to be examined. The recipes that were logged as being used in the last two months were adjusted. If you have another recipe that needs to be adjusted/tested, please let Usha or me know. If you are using SF6 only, please be aware of unstable plasma problems. If you observe problems, note which recipe you are using and which step is showing problems. Thanks. From xuanwu at snf.stanford.edu Sat Sep 11 10:24:55 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sat, 11 Sep 2010 10:24:55 -0700 Subject: Shutdown lampoly SNF 2010-09-11 10:24:54: Exit arm stuck in process chamber Message-ID: The exit arm and a test wafer are stuck in the process chamber, and one of my wafers is stuck in the loading chamber. Clearing the alarms didn't do anything. From cbaxter at snf.stanford.edu Mon Sep 13 07:52:09 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Sep 2010 07:52:09 -0700 Subject: Shutdown lampoly SNF 2010-09-11 10:24:54: Exit arm stuck in process chamber Message-ID: Recovered exit load arm and unload wafer from entrance load lock and main chamber.. From mtang at snf.stanford.edu Tue Sep 14 13:50:29 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 14 Sep 2010 13:50:29 -0700 Subject: Comment lampoly SNF 2010-09-14 13:50:28: Chiller problem, fixed Message-ID: There was a chiller error. Mike added more coolant. He observes a small leak, which will have to be fixed at some point. From mtang at snf.stanford.edu Tue Sep 14 13:57:13 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 14 Sep 2010 13:57:13 -0700 Subject: Comment lampoly SNF 2010-09-14 13:57:13: Parameters/config files Message-ID: It appears the parameters or configuration files have some anamolous data. This should not affect Recipe 1 or other recipes not using gas 4. Will work on this more tomorrow. From xuanwu at snf.stanford.edu Tue Sep 14 18:05:20 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 14 Sep 2010 18:05:20 -0700 Subject: Comment lampoly SNF 2010-09-14 18:05:20: Re: Parameters Message-ID: Recipe 1 parameters loaded from disk had 30s for main etch and 0s for overetch. Changed them to 60/30 and resaved. From mtang at snf.stanford.edu Wed Sep 15 16:06:13 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:06:13 -0700 Subject: Comment lampoly SNF 2010-09-15 16:06:13: Checking system configuration Message-ID: Decided to check the system constants since some odd things have been observed since the last system boot up. However, Recipe 1 now seems quite stable with the recent preset adjustments. We will need to keep an eye on this, since these presets should not require adjustment in absence of hardware changes. On the Configure 1 page, the RF#2 reflected AI should be 250 (is 240). Did not change yet, but will do so later after testing - no significant effect is expected. Changed gas 4 name to sf6 (upper case does not work.) Changed gas 4 maximum flow from 200 (in original config) to 122 (more recent config). The reason for this is that the gas 4 MFC is calibrated for CF4 although we are using it for SF6. This reverted back to the old original config in the recent hard drive crash. With the appropriate gas correction factors, 122 sccm is correct and consistent with the SF6 recipes developed over the past several years. This gas flow change, however, is not responsible for the unstable RF observed on many SF6 recipes -- we will need to continue to troubleshoot. From mtang at snf.stanford.edu Fri Sep 17 08:55:24 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Sep 2010 08:55:24 -0700 Subject: Shutdown lampoly SNF 2010-09-17 08:55:24: RF Tuning adjustment? Message-ID: The tune settings on the upper electrode have shifted again from 19000 up to 23000 and 26000. The limit is a bit above 30000 and we seem to be approaching this. The load setting, however, remains the same. I wonder if the coupling for the tune in the automatch has slipped -- and am shutting down so it can be checked. From mtang at snf.stanford.edu Fri Sep 17 17:03:27 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Sep 2010 17:03:27 -0700 Subject: Shutdown lampoly SNF 2010-09-17 08:55:24: RF Tuning adjustment? Message-ID: Machine is conditionally usable. The load and tune settings had to be changed yet again. However, several people have said they need this, so we'll put it up. Please be aware that if you get an RF error, the tuning will probably have reached its limit and the machine should be put down. Recipes 1, 2, 25, and 90 were modified for new tune settings. If you use another recipe, please copy over from one of these to get good tune start poinjts. From mtang at snf.stanford.edu Fri Sep 17 20:36:01 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Sep 2010 20:36:01 -0700 Subject: Comment lampoly SNF 2010-09-17 20:36:01: Please use with care Message-ID: Machine is conditionally usable. The load and tune settings had to be changed yet again. However, several people have said they need this, so we'll put it up. Please be aware that if you get an RF error, the tuning will probably have reached its limit and the machine should be put down. With standard tolerances, it should be safe for the machine to run even if the tuning reaches its limit as it will error out to protect itself. However, do not run repeatedly if errors or alarms are encountered. Recipes 1, 2, 25, and 90 were modified for new tune settings. If you use another recipe, please copy over from one of these to get good tune start points. From jcdoll at snf.stanford.edu Sun Sep 19 10:13:12 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 19 Sep 2010 10:13:12 -0700 Subject: Problem lampoly SNF 2010-09-19 10:13:11: Error 57 - shuttle failed to move to home position Message-ID: Ran 10 warmup wafers without issue, but got this error when trying to run my device wafers. Nothing made it into the process chamber. Machine is inoperable until the shuttle arm is rehomed, but not disabling it in case it is possible to resolve today. From mtang at snf.stanford.edu Tue Sep 21 12:43:36 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 21 Sep 2010 12:43:36 -0700 Subject: Problem lampoly SNF 2010-09-19 10:13:11: Error 57 - shuttle failed to move to home position Message-ID: Cesar resolved this early Monday morning. This is an intermittent, but persistent error. Cesar suggests a standard procedure for calibrating and aligning the harmonic drives and sensors, once other priority etch area issues are resolved. From mtang at snf.stanford.edu Thu Sep 23 16:11:31 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:11:31 -0700 Subject: Comment lampoly SNF 2010-08-26 16:31:17: Gas 4 is SF6 Message-ID: Now labeled sf6 (lower case -- caps didn't work.) From mtang at snf.stanford.edu Thu Sep 23 16:11:56 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:11:56 -0700 Subject: Comment lampoly SNF 2010-07-03 18:30:55: Gas 4 is SF6 Message-ID: Now labeled sf6 (lower case.) From mtang at snf.stanford.edu Thu Sep 23 16:13:32 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:13:32 -0700 Subject: Problem lampoly SNF 2010-07-20 13:11:03: RF Power stability Message-ID: We swapped upper and lower RF power supplies (they are identical) to troubleshoot the RF power and the instability problem seems to have disappeared. The RF presets had to be adjusted again, a little. See next Coral message. From mtang at snf.stanford.edu Thu Sep 23 16:15:18 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:15:18 -0700 Subject: Problem lampoly SNF 2010-09-09 13:42:28: RF refl power Message-ID: While troubleshooting RF stability problem, we swapped the upper and lower electrode RF supplies. The problem seems to have resolved -- at least the reflected power and forward power on ICP are stable. The tune and load presets were adjusted slightly. Will keep an eye on this. From mtang at snf.stanford.edu Thu Sep 23 16:24:46 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:24:46 -0700 Subject: Comment lampoly SNF 2010-09-23 16:24:45: Tune/Load presets Message-ID: We swapped upper and lower RF power supplies during the course of troubleshooting unstable ICP power. The stability problem appears to have resolved. Moreover, the lower RF power is better tuned and more stable than before (HALO supply??) I adjusted the tune and load presets (only slightly) on the following (upper and lower RF): Recipe 1/2: - Step 3 - 28000/14000; 7000/9500 - Step 5 - 25000/23000; 7000/9500 - step 7 - 22000/27000; 7000/9500 Recipe 25: - Step 3 - 28000/14000; 7000/9500 - Step 5 - 25000/20000; 7000/9500 Recipe 90: - Step 3 - Same as above - Step 5 - 24000/22000; 7000/9500 - Step 7 - 22000/24000; 7000/9500 The presets are not too different than they have been for the last few days, but still very different from where they were a few weeks ago and a couple of months ago, esp. for the tune. From mtang at snf.stanford.edu Thu Sep 23 16:27:10 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:27:10 -0700 Subject: Comment lampoly SNF 2010-09-23 16:27:10: HBr shuts off slowly Message-ID: The HBr MFC seems to take quite a while to shut off (it measures a few sccm for 20 seconds or so.) No recipes seem to require quick shutoff (where a non-HBR step follows), but something to keep an eye on. From wslee at snf.stanford.edu Sat Sep 25 11:05:34 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sat, 25 Sep 2010 11:05:34 -0700 Subject: Problem lampoly SNF 2010-09-25 11:05:34: Unable to set RF Message-ID: I was running recipe 3 for alignment marks (breakthrough and main etch steps are the same as recipe 1). During breakthrough, the setpoint was 250 for the RF, but it stayed at -10. I repeated for a few dummies but got the same problem each time. Please fix soon. From carterlin at snf.stanford.edu Sun Sep 26 16:31:22 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sun, 26 Sep 2010 16:31:22 -0700 Subject: Problem lampoly SNF 2010-09-26 16:31:21: RF tolerance exceeded Message-ID: stop at step3 7s at recipe 1 From xuanwu at snf.stanford.edu Sun Sep 26 23:02:11 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 26 Sep 2010 23:02:11 -0700 Subject: Problem lampoly SNF 2010-09-26 23:02:10: RF problems; don't bother trying Message-ID: SF6 recipe also has the -10 problem. RF probably broken. From mtang at snf.stanford.edu Mon Sep 27 07:43:10 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Sep 2010 07:43:10 -0700 Subject: Shutdown lampoly SNF 2010-09-27 07:43:09: Troubleshoot RF problem reports Message-ID: From cbaxter at snf.stanford.edu Mon Sep 27 08:20:24 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Sep 2010 08:20:24 -0700 Subject: Comment lampoly SNF 2010-09-27 08:20:24: Update: Message-ID: The upper rf generator shutoff, i reset the rf generator and now testing using recipe#1.. From cbaxter at snf.stanford.edu Mon Sep 27 08:55:38 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Sep 2010 08:55:38 -0700 Subject: Comment lampoly SNF 2010-09-27 08:55:37: Update: Message-ID: The upper rf generator is overheating when running long etch recipe step (300sec reciep#99) but other recipe with short etch recipe step has no problem. The water cooling flow is good.. From cbaxter at snf.stanford.edu Mon Sep 27 09:29:14 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:29:14 -0700 Subject: Shutdown lampoly SNF 2010-09-27 07:43:09: Troubleshoot RF problem reports Message-ID: Changed the recipe#99 etch step to 150sec and ran two wafers w/out problem. From cbaxter at snf.stanford.edu Mon Sep 27 09:30:16 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:30:16 -0700 Subject: Problem lampoly SNF 2010-09-26 23:02:10: RF problems; don't bother trying Message-ID: Changed recipe#99 clean to 150sec. From cbaxter at snf.stanford.edu Mon Sep 27 09:30:23 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:30:23 -0700 Subject: Problem lampoly SNF 2010-09-26 16:31:21: RF tolerance exceeded Message-ID: From cbaxter at snf.stanford.edu Mon Sep 27 09:30:42 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:30:42 -0700 Subject: Problem lampoly SNF 2010-09-25 11:05:34: Unable to set RF Message-ID: From mtang at snf.stanford.edu Mon Sep 27 09:52:47 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:52:47 -0700 Subject: Comment lampoly SNF 2010-09-27 09:52:47: Update on RF Message-ID: Just to summarize: We swapped the upper and lower RF generators last week, which seems to have addressed the instability problem reported on the upper electrode. We tested various recipes and adjusted the presets accordingly. However, it seems that the generator on the ICP (formerly the lower) is not able to run at high power for a long time -- it is fine for all recipes, except for the CLEAN recipe #99. Subsequent RF problems were reported on other recipes because by then the generator had overheated and shutoff. Cesar is working on getting a functioning rebuild replacement generator. In the meantime, Cesar tested the current generator and various recipes. The ICP shuts off only on #99 which has a setpoint of 600 W and runs for 5 minutes. We don't want to switch generators back now, because that will reintroduce the stability problem. So, for now, recipe #99 is set to run for 150 seconds. Please run this 3X to condition/clean the chamber, if needed. From carterlin at snf.stanford.edu Mon Sep 27 17:13:36 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Mon, 27 Sep 2010 17:13:36 -0700 Subject: Problem lampoly SNF 2010-09-27 17:13:36: Low bias Message-ID: Recipe 1, step3 bias -60V, step5 bias -60V, step7 bias -50V. It used to be -120V, -120V, -90V respectively From mtang at snf.stanford.edu Tue Sep 28 12:45:31 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 28 Sep 2010 12:45:31 -0700 Subject: Shutdown lampoly SNF 2010-09-28 12:45:30: DC Bias problem Message-ID: Yes, the DC bias is off. The lower generator (formerly upper) is the problem. Cesar has a line on a replacement, hopefully in the next day or two. We will need to requalify the system afterwards. From mtang at snf.stanford.edu Thu Sep 30 15:18:17 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 30 Sep 2010 15:18:17 -0700 Subject: Comment lampoly SNF 2010-09-30 15:18:17: Update Message-ID: Cesar has picked up a replacement RF power supply and plans to come in to install it Friday.