Problem lampoly SNF 2010-09-09 13:42:28: RF refl power

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Thu Sep 9 13:42:28 PDT 2010


I ran recipe 1 on 5 dummy wafers, but the first three had really high top RF refl powers on step 7, and that caused the hard tolerance to be exceeded.  The last 2 wafers were okay.
I then ran recipe 80, and the main etch aborted because of the same problem.  I ran my wafer through again, and then it worked, but  the tuning was fluctuating a lot.




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