Shutdown lampoly SNF 2010-09-11 10:24:54: Exit arm stuck in process chamber

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Sat Sep 11 10:24:55 PDT 2010


The exit arm and a test wafer are stuck in the process chamber, and one of my wafers is stuck in the loading chamber.  Clearing the alarms didn't do anything.




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