Shutdown lampoly SNF 2010-09-11 10:24:54: Exit arm stuck in process chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Sep 13 07:52:09 PDT 2010

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Recovered exit load arm and unload wafer from entrance
load lock and main chamber..

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Next message: Comment lampoly SNF 2010-09-14 13:50:28: Chiller problem, fixed
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