Comment lampoly SNF 2010-09-14 18:05:20: Re: Parameters

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Tue Sep 14 18:05:20 PDT 2010


Recipe 1 parameters loaded from disk had 30s for main etch and 0s for overetch.  Changed them to 60/30 and resaved.




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