Comment lampoly SNF 2010-09-14 18:05:20: Re: Parameters
xuanwu at snf.stanford.edu
xuanwu at snf.stanford.edu
Tue Sep 14 18:05:20 PDT 2010
Recipe 1 parameters loaded from disk had 30s for main etch and 0s for overetch. Changed them to 60/30 and resaved.
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