Problem lampoly SNF 2010-09-19 10:13:11: Error 57 - shuttle failed to move to home position

jcdoll at snf.stanford.edu jcdoll at snf.stanford.edu
Sun Sep 19 10:13:12 PDT 2010


Ran 10 warmup wafers without issue, but got this error when trying to run my device wafers. Nothing made it into the process chamber. Machine is inoperable until the shuttle arm is rehomed, but not disabling it in case it is possible to resolve today.




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