Problem lampoly SNF 2010-09-09 13:42:28: RF refl power

mtang at snf.stanford.edu mtang at snf.stanford.edu
Thu Sep 23 16:15:18 PDT 2010


While troubleshooting RF stability problem, we swapped the upper and lower electrode RF supplies.  The problem seems to have resolved -- at least the reflected power and forward power on ICP are stable.  The tune and load presets were adjusted slightly.  Will keep an eye on this.




More information about the lampoly-pcs mailing list