Comment lampoly SNF 2010-09-23 16:27:10: HBr shuts off slowly

mtang at snf.stanford.edu mtang at snf.stanford.edu
Thu Sep 23 16:27:10 PDT 2010


The HBr MFC seems to take quite a while to shut off (it measures a few sccm for 20 seconds or so.)  No recipes seem to require quick shutoff (where a non-HBR step follows), but something to keep an eye on.




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