Problem lampoly SNF 2010-09-25 11:05:34: Unable to set RF

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sat Sep 25 11:05:34 PDT 2010


I was running recipe 3 for alignment marks (breakthrough and main etch steps are the same as recipe 1).  During breakthrough, the setpoint was 250 for the RF, but it stayed at -10.  I repeated for a few dummies but got the same problem each time.  Please fix soon.




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