Comment lampoly SNF 2010-09-27 08:55:37: Update:
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Sep 27 08:55:38 PDT 2010
The upper rf generator is overheating when running long
etch recipe step (300sec reciep#99) but other recipe with
short etch recipe step has no problem. The water cooling flow
is good..
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