Comment lampoly SNF 2010-09-27 08:55:37: Update:

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Sep 27 08:55:38 PDT 2010


The upper rf generator is overheating when running long
etch recipe step (300sec reciep#99) but other recipe with
short etch recipe step has no problem.  The water cooling flow
is good..




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