From bchui at snf.stanford.edu Fri Apr 1 18:17:35 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 1 Apr 2011 18:17:35 -0700 Subject: Shutdown lampoly SNF 2011-04-01 18:17:35: Timer overflow Message-ID: Machine is totally frozen; the screen shows a bunch of hex numbers. A couple of days ago it was warning that the internal timer would overflow in 48 hours, so I think that's what happened. Needs reboot. From cbaxter at snf.stanford.edu Sun Apr 3 22:08:26 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 3 Apr 2011 22:08:26 -0700 Subject: Shutdown lampoly SNF 2011-04-01 18:17:35: Timer overflow Message-ID: Lose the 24vdc, changed fuse on 24vdc power supply and reboot system. From eenriquez at snf.stanford.edu Mon Apr 4 09:31:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Apr 2011 09:31:55 -0700 Subject: Comment lampoly SNF 2011-03-21 10:34:40: Pumped out O2 line Message-ID: Archived From usha at snf.stanford.edu Tue Apr 5 06:45:34 2011 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Tue, 5 Apr 2011 06:45:34 -0700 Subject: Comment lampoly SNF 2011-04-05 06:45:34: Etch Rate Qual Data from 3/31/2011 Message-ID: Recipe 1 - 10s BT/60s ME/30s OE Si Loss/Unif = 4052A; 0.77% Resist Loss/ Unif = 885A; 4.07% Oxide Loss / Unif. = 215A / 6.51% Poly Loss/ Unif = 4461A /1.14% Data similar to 2/23/11 qual data From eenriquez at snf.stanford.edu Fri Apr 8 07:53:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 07:53:08 -0700 Subject: Comment lampoly SNF 2011-02-01 14:40:01: Replaced HBR cylinder Message-ID: Archived From sclaussen at snf.stanford.edu Sat Apr 16 20:09:24 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sat, 16 Apr 2011 20:09:24 -0700 Subject: Shutdown lampoly SNF 2011-04-16 20:09:23: First dummy wafer broke Message-ID: Wafer broke somewhere in the process. It (what's left of it) is sitting on the receiving arm- I'm not sure where the pieces are. The remainder of my dummies are on the input casette. From cbaxter at snf.stanford.edu Sun Apr 17 03:54:12 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 17 Apr 2011 03:54:12 -0700 Subject: Shutdown lampoly SNF 2011-04-16 20:09:23: First dummy wafer broke Message-ID: Recovered wafer from etch chamber, found two wafers on chuck. I checked and verified wafer transfer and cycled dummy wafers. From bchui at snf.stanford.edu Mon Apr 18 02:37:29 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 18 Apr 2011 02:37:29 -0700 Subject: Shutdown lampoly SNF 2011-04-18 02:37:28: Turbo pump failure error Message-ID: Couldn't even start the machine running dummy wafers From bchui at snf.stanford.edu Mon Apr 18 04:10:02 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 18 Apr 2011 04:10:02 -0700 Subject: Comment lampoly SNF 2011-04-18 04:10:02: LAM often breaks first wafer Message-ID: Re S.Claussen's broken wafer, I also want to say that the LAM tends to break the first wafer into the chamber after being idle for a long time. A day or two ago, the same thing happened to me (the first dummy wafer broke--this explains Cesar's finding two wafers in the chamber). I meant to write it up but forgot. And strangely enough, the machine continued to function and etch normally as far as etch rate was concerned. From eenriquez at snf.stanford.edu Mon Apr 18 15:06:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Apr 2011 15:06:23 -0700 Subject: Comment lampoly SNF 2011-04-18 15:06:21: Update Message-ID: Defective pump controller. Still troubleshooting. From eenriquez at snf.stanford.edu Tue Apr 19 15:08:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Apr 2011 15:08:19 -0700 Subject: Comment lampoly SNF 2011-04-19 15:08:19: Update Message-ID: Sent the pump out for repair. System should be ready by 7pm tomorrow. From eenriquez at snf.stanford.edu Wed Apr 20 17:41:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Apr 2011 17:41:47 -0700 Subject: Comment lampoly SNF 2011-04-20 17:41:47: Update Message-ID: Repaired pump and controller will be back by noon tomorrow. From eenriquez at snf.stanford.edu Fri Apr 22 11:31:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 11:31:05 -0700 Subject: Shutdown lampoly SNF 2011-04-18 02:37:28: Turbo pump failure error Message-ID: Installed newly rebuilt pump with a repaired controller. Ran 5 wafers using recipe 99 with no problems. The root cause of the problem was a leaky pump bellows. The leak caused the pump to seize which in turn damaged the controller. From eenriquez at snf.stanford.edu Fri Apr 22 11:31:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 11:31:22 -0700 Subject: Comment lampoly SNF 2011-04-18 15:06:21: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 22 11:31:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 11:31:30 -0700 Subject: Comment lampoly SNF 2011-04-19 15:08:19: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 22 11:31:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 11:31:35 -0700 Subject: Comment lampoly SNF 2011-04-20 17:41:47: Update Message-ID: Archived From daesung at snf.stanford.edu Sat Apr 23 16:44:01 2011 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sat, 23 Apr 2011 16:44:01 -0700 Subject: Problem lampoly SNF 2011-04-23 16:44:00: Wafer chiller failure Message-ID: From shott at snf.stanford.edu Sun Apr 24 09:58:09 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 24 Apr 2011 09:58:09 -0700 Subject: Problem lampoly SNF 2011-04-23 16:44:00: Wafer chiller failure Message-ID: Although there was no evidence of significant leakage, the lower chiller was showing a low liquid level. I added about 2 liters of 50/50 glycol water which was more than enough to eliminate the interlock problem but didn't overflow the tank. We must has some sort of a slow leak in that system .... but I don't know where. John From rik at snf.stanford.edu Sun Apr 24 23:21:59 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sun, 24 Apr 2011 23:21:59 -0700 Subject: Shutdown lampoly SNF 2011-04-24 23:21:58: Wafer stuck in edge detector Message-ID: Alarm #2: Entrance load failed requested rotate action. From rik at snf.stanford.edu Sun Apr 24 23:24:13 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sun, 24 Apr 2011 23:24:13 -0700 Subject: Comment lampoly SNF 2011-04-24 23:24:13: Carrier left for stuck wafer Message-ID: Please unload the wafer that is stuck in the carrier I left on top of the machine. The wafer has had undergone an e-beam patterning step that took 24 hours, so please be careful not to damage the surface. Thanks. From cbaxter at snf.stanford.edu Mon Apr 25 17:19:08 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 25 Apr 2011 17:19:08 -0700 Subject: Shutdown lampoly SNF 2011-04-24 23:21:58: Wafer stuck in edge detector Message-ID: Recovered wafer from entrance load lock, turn off 24vdc and manually moved load arm. The load arm lose position reset and homed at macro page. From sclaussen at snf.stanford.edu Tue Apr 26 21:32:42 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 26 Apr 2011 21:32:42 -0700 Subject: Shutdown lampoly SNF 2011-04-26 21:32:41: Lost/broken wafer Message-ID: I am getting Alarm 54: Wafer not sensed in cassette, and it seems one of my dummy wafers is missing (meaning, it's potentially broken in the chamber). From eenriquez at snf.stanford.edu Wed Apr 27 16:26:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Apr 2011 16:26:27 -0700 Subject: Shutdown lampoly SNF 2011-04-26 21:32:41: Lost/broken wafer Message-ID: Removed broken wafer, wet cleaned the chamber, ran recipe 99 (6 wfrs and recipe #1). From wslee at snf.stanford.edu Thu Apr 28 20:05:31 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 28 Apr 2011 20:05:31 -0700 Subject: Problem lampoly SNF 2011-04-28 20:05:30: RF Hard Tolerance Message-ID: In recipe 1, there is consistently an RF hard tolerance error during the overetch step. From eenriquez at snf.stanford.edu Fri Apr 29 09:52:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 09:52:19 -0700 Subject: Problem lampoly SNF 2011-04-28 20:05:30: RF Hard Tolerance Message-ID: Changed the RF matching network presets on steps 6 and 7. Ran 5 wafers with no problems. From mtang at snf.stanford.edu Fri Apr 29 11:55:16 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Apr 2011 11:55:16 -0700 Subject: Shutdown lampoly SNF 2011-04-29 11:55:16: Chamber clean request Message-ID: Rishi reports grassing observed in wafers he ran last night. He's run for 3 consecutive days same wafers on the same recipe (basically #1) and only observed this starting last night. Am running a pump purge cycle now. Elmer/Mike - could you do a chamber wipe down please? From mtang at snf.stanford.edu Fri Apr 29 12:40:44 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Apr 2011 12:40:44 -0700 Subject: Comment lampoly SNF 2011-04-29 12:40:43: Hard drive/Floppy drive Message-ID: I'm not sure when exactly, but it seems that some time since 4/14/11, the floppy drive began to work again. It actually has not worked since last June (the problem is not the drive, but communication with the drive controller card - which is no longer supported.) When it started working again, recipes loaded were using settings from last June. Because of the work done on the RF tuning late last year, RF presets were not correct, which explains the recent rash of RF errors. By the way, the config file is loaded from the hard drive, so machine settings should be fine. Recipes that had been created between Jun '10 and 4/14/11 or so would not exist on the floppy so would have loaded correctly from the hard drive. In any case, I've removed the floppy from the drive for now, after having backed up system constants and machine configuration. This way, we should have only one version of the recipes, on the hard drive. From mtang at snf.stanford.edu Fri Apr 29 14:50:12 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Apr 2011 14:50:12 -0700 Subject: Shutdown lampoly SNF 2011-04-29 11:55:16: Chamber clean request Message-ID: Chamber wipedown done. It's now undergoing pump purge cycles. I'll start recipe 99 and a cassette of wafers. Please make sure to run at least 10 conditioning wafers before using. The chamber, by the way, was not very dirty... so I am not sure this will address Rishi's observation of some grass. From mtang at snf.stanford.edu Fri Apr 29 14:53:15 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Apr 2011 14:53:15 -0700 Subject: Problem lampoly SNF 2011-04-29 14:53:15: Grass report Message-ID: Rishi reported observing some grass (residual silicon) on recent wafers. We did a chamber clean which often addresses this. However, the chamber was not very dirty, though many wafer chips. Please inspect your wafers and report anything unusual on Coral. Will run tests next week. From mtang at snf.stanford.edu Sat Apr 30 06:31:39 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 30 Apr 2011 06:31:39 -0700 Subject: Comment lampoly SNF 2011-04-30 06:31:38: Leak Up rate Message-ID: Ben Chui ran 5 wafers with recipe 99 and 5 with the standard recipe, then measured the leakback rate at 0.72 mt/min. This is a good post-chamber clean value. The machine should be OK to run, though you'll want to run more standard recipe wafers to condition the chamber. From bchui at snf.stanford.edu Sat Apr 30 20:55:51 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 30 Apr 2011 20:55:51 -0700 Subject: Problem lampoly SNF 2011-04-30 20:55:51: Gap drive electrode not large enough to transfer wafer Message-ID: Please retrieve my wafer from the entrance load lock and place it in the wafer box provided. Thanks!