Comment lampoly SNF 2011-04-05 06:45:34: Etch Rate Qual Data from 3/31/2011

usha at snf.stanford.edu usha at snf.stanford.edu
Tue Apr 5 06:45:34 PDT 2011


Recipe 1 - 10s BT/60s ME/30s OE
Si Loss/Unif = 4052A; 0.77%
Resist Loss/ Unif  = 885A; 4.07%
Oxide Loss / Unif. = 215A / 6.51%
Poly Loss/ Unif = 4461A /1.14%
Data similar to 2/23/11 qual data




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