Shutdown lampoly SNF 2011-04-18 02:37:28: Turbo pump failure error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 22 11:31:05 PDT 2011


Installed newly rebuilt pump with a repaired controller.  Ran 5 wafers using recipe 99 with no problems.  The root cause of the problem was a leaky pump bellows.  The leak caused the pump to seize which in turn damaged the controller. 




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