Shutdown lampoly SNF 2011-04-24 23:21:58: Wafer stuck in edge detector

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Apr 25 17:19:08 PDT 2011


Recovered wafer from entrance load lock, turn off 24vdc
and manually moved load arm.  The load arm lose position
reset and homed at macro page.




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