Shutdown lampoly SNF 2011-04-24 23:21:58: Wafer stuck in edge detector
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Apr 25 17:19:08 PDT 2011
Recovered wafer from entrance load lock, turn off 24vdc
and manually moved load arm. The load arm lose position
reset and homed at macro page.
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