Shutdown lampoly SNF 2011-04-26 21:32:41: Lost/broken wafer

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Tue Apr 26 21:32:42 PDT 2011


I am getting Alarm 54: Wafer not sensed in cassette, and it seems one of my dummy wafers is missing (meaning, it's potentially broken in the chamber).




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