Shutdown lampoly SNF 2011-04-29 11:55:16: Chamber clean request

mtang at mtang at
Fri Apr 29 11:55:16 PDT 2011

Rishi reports grassing observed in wafers he ran last night.  He's run for 3 consecutive days same wafers on the same recipe (basically #1) and only observed this starting last night.  Am running a pump purge cycle now.  Elmer/Mike - could you do a chamber wipe down please?  

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