Shutdown lampoly SNF 2011-04-29 11:55:16: Chamber clean request

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Apr 29 11:55:16 PDT 2011


Rishi reports grassing observed in wafers he ran last night.  He's run for 3 consecutive days same wafers on the same recipe (basically #1) and only observed this starting last night.  Am running a pump purge cycle now.  Elmer/Mike - could you do a chamber wipe down please?  




More information about the lampoly-pcs mailing list