Shutdown lampoly SNF 2011-04-29 11:55:16: Chamber clean request

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Apr 29 14:50:12 PDT 2011


Chamber wipedown done.  It's now undergoing pump purge cycles.  I'll start recipe 99 and a cassette of wafers.  Please make sure to run at least 10 conditioning wafers before using.  The chamber, by the way, was not very dirty...  so I am not sure this will address Rishi's observation of some grass.




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