Problem lampoly SNF 2011-04-29 14:53:15: Grass report

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Apr 29 14:53:15 PDT 2011


Rishi reported observing some grass (residual silicon) on recent wafers.  We did a chamber clean which often addresses this.  However, the chamber was not very dirty, though many wafer chips.  Please inspect your wafers and report anything unusual on Coral.  Will run tests next week.




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