Comment lampoly SNF 2011-04-30 06:31:38: Leak Up rate

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sat Apr 30 06:31:39 PDT 2011


Ben Chui ran 5 wafers with recipe 99 and 5 with the standard recipe, then measured the leakback rate at 0.72 mt/min.  This is a good post-chamber clean value.  The machine should be OK to run, though you'll want to run more standard recipe wafers to condition the chamber. 




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