From mdickey at snf.stanford.edu Mon Aug 1 07:05:34 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 1 Aug 2011 07:05:34 -0700 Subject: Comment lampoly SNF 2011-08-01 07:05:33: resistivity Message-ID: Chiller is failed for low resistivity From mdickey at snf.stanford.edu Mon Aug 1 07:38:34 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 1 Aug 2011 07:38:34 -0700 Subject: Problem lampoly SNF 2011-07-30 07:32:14: water chiller has failed Message-ID: cleared error on the chiller. everything is green now From bchui at snf.stanford.edu Fri Aug 5 18:25:15 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 5 Aug 2011 18:25:15 -0700 Subject: Shutdown lampoly SNF 2011-08-05 18:25:15: Wafer fell off XLL arm, still inside XLL Message-ID: When wafer entered reaction chamber, the machine alarmed saying turbo pump pressure was above 3T (or something like that). The process then aborted (no etching occurred). When the machine arm tried to move the wafer out, the wafer came as far out as the XLL but then fell off the arm. Wafer is still half-resting on the arm though. I have pressed 'HALT WAFER TRANSPORT' to prevent the arm from doing anything else that might damage the wafer. Please retrieve the wafer and put it in the box with my name on it. (It's a precious wafer.) Thanks! From cbaxter at snf.stanford.edu Sat Aug 6 20:35:08 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 20:35:08 -0700 Subject: Shutdown lampoly SNF 2011-08-05 18:25:15: Wafer fell off XLL arm, still inside XLL Message-ID: Recovered stuck wafer on exit load and cycled 3 dummy wafers. From eenriquez at snf.stanford.edu Tue Aug 9 11:00:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Aug 2011 11:00:41 -0700 Subject: Comment lampoly SNF 2011-08-01 07:05:33: resistivity Message-ID: Replaced DI water cartridges From sgchong at snf.stanford.edu Sun Aug 14 16:54:26 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 14 Aug 2011 16:54:26 -0700 Subject: Problem lampoly SNF 2011-08-14 16:54:25: Alarm 40 Message-ID: Alarm 40: Entrance loadlock pump fails, convectron above crossover pressure. l was starting to run recipe #1 on dummy wafers, when this alarm came up. The pressure is reading 0.09mT. There are no wafers in the chamber, but there is one wafer (dummy) waiting to go in. I've left the tool in orange, in case there is a quick fix. From sgchong at snf.stanford.edu Sun Aug 14 17:06:59 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 14 Aug 2011 17:06:59 -0700 Subject: Shutdown lampoly SNF 2011-08-14 17:06:58: alarm40 Message-ID: putting in shutdown (see "problems") for details From sgchong at snf.stanford.edu Sun Aug 14 17:08:19 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 14 Aug 2011 17:08:19 -0700 Subject: Comment lampoly SNF 2011-08-14 17:08:18: Correction - there is one wafer in the chamber Message-ID: From cbaxter at snf.stanford.edu Sun Aug 14 20:55:30 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 14 Aug 2011 20:55:30 -0700 Subject: Comment lampoly SNF 2011-08-14 20:55:30: Bad load lock pump Message-ID: The load lock pump is bad, it only pumped down below 5torr. Pump is turned off... From eenriquez at snf.stanford.edu Mon Aug 15 15:00:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 15:00:35 -0700 Subject: Comment lampoly SNF 2011-08-14 20:55:30: Bad load lock pump Message-ID: Replaced the bad pump. From eenriquez at snf.stanford.edu Mon Aug 15 15:01:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 15:01:52 -0700 Subject: Shutdown lampoly SNF 2011-08-14 17:06:58: alarm40 Message-ID: Replaced the bad LL pump. Did not see any wafers on the system. Need to open the process chamber to verify that the chamber is empty. From eenriquez at snf.stanford.edu Mon Aug 15 15:02:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 15:02:09 -0700 Subject: Problem lampoly SNF 2011-08-14 16:54:25: Alarm 40 Message-ID: Replaced the bad LL pump. Did not see any wafers on the system. Need to open the process chamber to verify that the chamber is empty. From eenriquez at snf.stanford.edu Mon Aug 15 15:02:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 15:02:23 -0700 Subject: Comment lampoly SNF 2011-07-07 09:22:02: Dummy wafers Message-ID: Archived From eenriquez at snf.stanford.edu Mon Aug 15 15:04:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 15:04:48 -0700 Subject: Shutdown lampoly SNF 2011-08-15 15:04:47: Verify chamber is empty Message-ID: User reported that he left a wafer in the chamber. I did not however find any wafers. Need to open the process chamber to verify that it is empty. From sgchong at snf.stanford.edu Mon Aug 15 16:17:54 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Mon, 15 Aug 2011 16:17:54 -0700 Subject: Comment lampoly SNF 2011-08-15 16:17:54: Correction - wafer in loadlock Message-ID: The wafer was in the loadlock, not the main chamber. From eenriquez at snf.stanford.edu Tue Aug 16 08:57:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Aug 2011 08:57:15 -0700 Subject: Comment lampoly SNF 2011-08-14 17:08:18: Correction - there is one wafer in the chamber Message-ID: Archived From eenriquez at snf.stanford.edu Tue Aug 16 08:58:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Aug 2011 08:58:28 -0700 Subject: Shutdown lampoly SNF 2011-08-15 15:04:47: Verify chamber is empty Message-ID: Verified the chamber was empty. Cycled 4 wafers with no problems. From eenriquez at snf.stanford.edu Tue Aug 16 08:58:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Aug 2011 08:58:35 -0700 Subject: Comment lampoly SNF 2011-08-15 16:17:54: Correction - wafer in loadlock Message-ID: Archived From wslee at snf.stanford.edu Tue Aug 16 11:44:55 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 16 Aug 2011 11:44:55 -0700 Subject: Comment lampoly SNF 2011-08-16 11:44:54: out of logsheets Message-ID: From sgchong at snf.stanford.edu Tue Aug 16 12:09:19 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Tue, 16 Aug 2011 12:09:19 -0700 Subject: Comment lampoly SNF 2011-08-16 12:09:18: Out of logsheets Message-ID: From mtang at snf.stanford.edu Tue Aug 16 14:22:07 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:22:07 -0700 Subject: Comment lampoly SNF 2011-08-16 11:44:54: out of logsheets Message-ID: Logsheets added. From mtang at snf.stanford.edu Tue Aug 16 14:22:10 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:22:10 -0700 Subject: Comment lampoly SNF 2011-08-16 12:09:18: Out of logsheets Message-ID: Logsheets added. From sgchong at snf.stanford.edu Tue Aug 16 15:06:58 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Tue, 16 Aug 2011 15:06:58 -0700 Subject: Shutdown lampoly SNF 2011-08-16 15:06:57: Leak in HBr cylinder Message-ID: Elmer found a leak in the HBr cylinder. Expected to come back up before noon tomorrow. From eenriquez at snf.stanford.edu Tue Aug 16 15:07:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Aug 2011 15:07:16 -0700 Subject: Problem lampoly SNF 2011-08-16 15:07:15: HBr is unavailable Message-ID: Small leak at the gas cylinder. The gas panel has been shutdown. From eenriquez at snf.stanford.edu Wed Aug 17 10:52:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Aug 2011 10:52:08 -0700 Subject: Shutdown lampoly SNF 2011-08-16 15:06:57: Leak in HBr cylinder Message-ID: Replaced leaky cylinder gasket. From eenriquez at snf.stanford.edu Wed Aug 17 10:52:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Aug 2011 10:52:14 -0700 Subject: Problem lampoly SNF 2011-08-16 15:07:15: HBr is unavailable Message-ID: Replaced leaky cylinder gasket. From popomoo at snf.stanford.edu Tue Aug 30 11:49:11 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Tue, 30 Aug 2011 11:49:11 -0700 Subject: Problem lampoly SNF 2011-08-30 11:49:10: water chiller has failed Message-ID: From cbaxter at snf.stanford.edu Tue Aug 30 11:59:34 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 Aug 2011 11:59:34 -0700 Subject: Problem lampoly SNF 2011-08-30 11:49:10: water chiller has failed Message-ID: Elmer reset the heatexchanger..