Problem lampoly SNF 2011-08-14 16:54:25: Alarm 40

sgchong at snf.stanford.edu sgchong at snf.stanford.edu
Sun Aug 14 16:54:26 PDT 2011


Alarm 40: Entrance loadlock pump fails, convectron above crossover pressure. 
l was starting to run recipe #1 on dummy wafers, when this alarm came up.  The pressure is reading 0.09mT.
There are no wafers in the chamber, but there is one wafer (dummy) waiting to go in. 
I've left the tool in orange, in case there is a quick fix. 




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